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High-density plasma source

DC CAFC
  • US 7,446,479 B2
  • Filed: 04/07/2004
  • Issued: 11/04/2008
  • Est. Priority Date: 04/22/2003
  • Status: Expired due to Fees
First Claim
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1. A plasma source comprising:

  • a) a cathode assembly comprising an inner cathode section and an outer cathode section;

    b) a first anode that is positioned adjacent to the outer cathode section and forming a gap there between; and

    c) a power supply that generates a first electric field across the gap between the first anode and the outer cathode section and that generates a second electric field between the inner cathode section and a second anode, the first electric field ionizing a volume of feed gas that is located in the gap, thereby generating an initial plasma, the second electric field super-ionizing the initial plasma to generate a plasma comprising a higher density of ions than the initial plasma.

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